Abstract
The LIGA process has several advantages such as free cross-sectional shaping and realization of great structural height in combination with small lateral dimensions. By this technique the micromechanical elements are made out of metal. In contrast to silicon, metal shows aging effects. As the micromechanical elements are normally deformed and therefore exposed to stress during activation it is of great interest to know the long term behaviour of these micromechanical LIGA elements. An experimental set-up is described to determine the fatigue curves (S-N curves) for micromechanical elements made of electroplated nickel using electromagnetic activation. Also experimental results are presented.
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