Abstract
Composition and structure of Fe/Al multilayer coatings after ion beam mixing at different temperatures are studied. Samples were prepared by consecutive sputter deposition of Fe and Al on well-polished silicon substrate. The samples were ion beam mixed with 330 keV Ar ions at the dose of 3×10 15 ions/cm 2 in the temperature range between room temperature and 400 °C. AES depth profiles showed that mixing between Fe and Al layers started at 100 °C and was complete at 400 °C. Fe K-edge EXAFS, however, reveals that Fe bcc metallic phase is still present at all temperatures. The amount of an additional Fe–Al phase is about 20% up to 300 °C, increasing to 50% at 400 °C.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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