Abstract
The structure of In1−xGaxAsyP1−y/InP superlattice (x=0.27 and y=0.60) was investigated by small-angle X-ray diffraction. The interference peaks caused by the superlattice structure were clearly observed. The period of the superlattice was determined from the peak angles based on a modified Bragg's law considering the X-ray refraction effect. Using the optical multilayer theory to analyze the diffraction patterns of the first and secondary peaks, we could determine the thickness of the two components (In1−xGaxAsyP1−y and InP) within method is applicable to any type of superlattice structure.
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