Abstract
A formulation for calculating the effective permittivity of a piezoelectric layered SAW structure is given and the exact frequency response of ZnO/diamond/Si layered SAW calculated. The frequency response of an unapodized SAW transducer is calculated and the center frequency shift due to the velocity dispersion explained. In addition, the electromechanical coupling coefficients of the ZnO/diamond/Si layered half space based on two different formulae are calculated and discussed. Finally, based on the results of the study, we propose a method for modeling the layered SAW device. The advantage of using the effective permittivity method is that not only the null frequency bandwidth but also the center frequency shift and insertion loss can be evaluated.
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