Abstract
A novel electrowetting on dielectric (EWOD) digital microfluidic device using the high dielectric constant material P(VDF-TrFE) (poly-vinylidene fluoride-trifluoroethylene) as the dielectric layer fabricated by spin-coating process is proposed. The device is featured with the advantages of both IC compatible process and low driving voltage. The contact angle between the liquid droplet and surface of the device changes from 118° to 75° under an applied voltage of 30V. The voltage-polarity-related electrowetting on dielectric phenomenon is observed and applied in our study. A novel single-side coplanar electrodes EWOD device is developed. EWOD at positive and negative voltage is so different that a droplet 3μL is successfully transported reciprocally under 20V based on the polarity change of driving voltage.
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