Abstract
The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning accuracy of the piezoelectric-actuated stage is limited due to the hysteretic nonlinearity of the piezo-electric actuators (PEA). To compensate this hysteresis problem, a feedforward controller based on an evolution algorithm is proposed. The dynamics of the hysteresis is formulated by the Bouc-Wen model and the evolutionary algorithms (EAs) are studied to identify the optimal parameters of the Bouc-Wen model. To verify the consistency, two micro-contouring tasks are implemented by the proposed feedforward controller with the feedback of linear optical scales in DSP based real-time control architecture.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
