Evolution of the interface microstructure of short-period Cr/Ti multilayers with increase in number of bi-layers

Abstract

Evolution of interface microstructure with addition of more number of layers has been investigated on Cr/Ti multilayer which is important for application as a mirror or monochromator in the “water window” soft X-ray spectral regime. Two sets of Cr/Ti multilayers at moderate and low bi-layer thickness regime have been prepared for this purpose using Ion Beam Sputtering technique. In one set, Cr/Ti multilayer with 25, 50, 60 and 100 numbers of bilayers with moderate bi-layer thickness of 3.8 nm have been deposited. In another set, four samples each having low bilayer thickness of 2.4 nm with 25, 50, 75 and 100 number of bi-layers have been prepared and the multilayers have subsequently been characterized with Specular X-ray reflectivity and diffuse X-ray scattering measurements at grazing incidence with hard X-rays. It is observed that cumulative effect of interface imperfections became more pronounced with increasing number of bilayers resulting in continuous increase in the interface width in both the thickness regimes; however, its evolution is not exactly same for the two sets of samples. Diffuse X-ray scattering result reveals that for the first set of samples, interface imperfections are dominated by interface roughness with no change in the interface diffusion with increase in number of layers, while for the second set, both interface roughness as well as interface diffusion contribute towards the cumulative accumulation of interface imperfections which is also confirmed by cross-sectional Transmission Electron Microscopy. Finally, performance of the multilayers in water window regime has been checked by soft X-ray reflectivity measurements using synchrotron radiation. The above results have direct implication in utilisation of these multilayers over a wide bi-layer thickness regime required to cover the full ‘water-window’ spectrum.