Abstract
The molecular dynamics simulation of the evolution of clusters of copper in a vacuum under low-energy argon ion bombardment has been performed. The clusters consisting of 26, 78, and 390 atoms have been studied at a bombarding particle energy ranging from 1 to 800 eV. The potential of the interaction between copper atoms has been simulated using the embedded atom method, whereas the interaction of copper atoms with argon atoms has been described using the Ziegler-Biersack-Littmark potential. As a result of the simulation, time dependences of the temperature and potential energy and the numerical values of the sputtering coefficients of free clusters under the ion bombardment have been obtained.
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