Abstract
Diamond like carbon (DLC) thin films, used as excellent solid lubricant, are grown on Si substrates at temperatures in the range of 100–600 °C using pulsed direct current magnetron sputtering to understand the role of substrate temperature on the tribological properties. Friction tests have been carried out using a micro-tribometer at a load of 2 N. Phase evolution in the films with temperature is studied using micro-Raman spectroscopy. Lateral force microscopy is employed to study the evolution of surface and friction topography in the films. We have observed an increase in the coefficient of friction (μ) from 0.05 to 0.30 with increase in deposition temperature. The films deposited below 400 °C exhibited excellent tribological properties with film deposited at 100 °C depicting the lowest value of μ (approx. 0.05). The films deposited above 400 °C have been found to wear out at early stages. The degradation in tribological properties of DLC films deposited at high temperatures is explained on the basis of structural transformation taking place during the film deposition.
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