Evolution of an electron energy distribution function in a weak dc magnetic field in solenoidal inductive plasma

Abstract

We investigated the evolution of the electron energy distribution function (EEDF) in a solenoidal inductively coupled plasma surrounded by an axial dc magnetic field. The increase in the dc magnetic field caused the EEDF to evolve from a bi-Maxwellian to a Maxwellian distribution. At the discharge center, the number of low energy electrons was significantly reduced while the high energy electron population showed little change when a weak dc magnetic field was present. However, at the discharge radial boundary, the high energy electron population decreased significantly with the magnetic field while the change in low energy population was not prominent compared to the discharge boundary. These changes in EEDFs at the boundary and center of the discharge are due to the radial confinement and the restriction of radial transport of electrons by dc magnetic field.