Abstract
We report on the formation and detection of a compressed fluid phase of Xe clusters in as- implanted Si, at room temperature. The simultaneous structural characterization of the Xe clusters and of the Si matrix was performed by X-ray diffraction at grazing incidence coupled with two-dimensional detection; in both cases, the nearest-neighbor distance and the coordination were obtained. In order to investigate the early stage of the atomic inclusion and the cluster segregation, the average compression and size of Xe fluid clusters within the amorphous Si matrix were explained within the simple Hard Sphere model.
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