Evaporation conditions and magnetic properties of Co-O perpendicular magnetic films

Abstract

The relationship between the deposition conditions and the magnetic properties of a newly developed Co-O perpendicular magnetic film was investigated. The higher the deposition rate, the more easily the perpendicular magnetic film can be obtained and excellent magnetic properties were obtained even at the deposition rate higher than 900 A/sec. It was found that the superior perpendicular magnetic properties can be obtained when the substrate temperature is near to the room temperature and that PET film can be used as substrate materials. The magnetic properties do not affected by the film thickness and an excellent perpendicular magnetic properties were obtained even at a thin film of 0.2μm thick. The magnetic properties of these films were equivalent to those of the Co-Cr film.