Abstract
Evaporation characteristics of electron beam gun heated sources : Paul C. Baynes and T. Nagarajan. Electrocomponent Sci. Technol.11, 175 (1984)
Highlights
The thickness of thin films using EBG heated sources decreases with increasing angle of emission 0, at a rate more rapid than cos20.1’2 An empirical relation was proposed by Graper to describe the same
While the emission characteristics based on the source-substrate geometry have been investigated for a number of source shapes,4 no such work has been reported for the EBG source
2.1 Cone Source: Consider the source of radius R and height H to consist of a stack of rings whose radii vary from 0 to R
Summary
The thickness of thin films using EBG heated sources decreases with increasing angle of emission 0, at a rate more rapid than cos20.1’2 An empirical relation was proposed by Graper to describe the same. Szilagyi tried to explain this theoretically but failed to do so as his functions f(r) and g(r) depend on parameters that are not well known. His assumption of a cone source implies a cos dependence in the umbral region of deposition, as will be shown in this paper. This is not borne out by Graper’s work which indicates self-masking effects being effective even at small emission angles. While the emission characteristics based on the source-substrate geometry have been investigated for a number of source shapes, no such work has been reported for the EBG source (other than a preliminary report by us )
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