Evalution of Plasma Composition and Mobilities in Argon Plasma with Chlorine as Additive

Abstract

AbstractResults of numerical evaluation of equilibrium compositions and mobilities in plasmas formed in the mixtures of argon and chlorine are given. The temperature dependence of the number densities of the components and their mobilities in function of temperature for low‐pressure (from0, 1 kPa to 1,0 kPa) and low‐temperature (from 500 K to 5 000 K) argon plasmas with 20% and 30% of added chlorine are evaluated. It is assumed that the system is kept under constant pressure and that a corresponding state of local themodynamical equilibrium is attained in it. A previously derived expression for the modified Debye radius, offering the possibility to treat the plasmas considered as weakly non‐ideal in the whole temperature range, is used and the cut‐off at the Landau length rather than of the smallest of ionic radii is introduced. This alteration in the evaluatin procedure brings different change in the final numerical results for all the relevant quantities.It is found that the equilibrium plasma composition depends considerably on the presence of chlorine in the whole temperature range for both pressures; the addition of chlorine significantly enhances number densities of all relevant charged constituents. This fact influences of the electron and ion collision frequencies and their mobilities too.