Abstract
The evaluation of fluid properties based on ultrasonic allows real-time measurement of small amounts of liquid samples. The ultrasonic reflection method is one of the ways to evaluate viscoelastic properties of liquids. In this study, we propose the highly sensitive evaluation of viscoelastic properties of liquids in the VHF range based on the oblique incidence technology with quasi-shear wave excited by c-axis tilted ScAIN thin films. Shear elasticity and shear viscosity of glycerin solutions were estimated from their complex reflection coefficient.
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