Abstract

Piezoelectric nanowires have attracted great interest as new building blocks of mechanical energy harvesting systems. This paper presents the design improvements of mechanical energy harvesters integrating vertical ZnO piezoelectric nanowires onto a Silicon or plastic membrane. We have calculated the energy generation and conversion performance of ZnO nanowires based vertical integrated nanogenerators in flexion mode. We show that in flexion mode ZnO nanowires are superior to bulk ZnO layer. Both mechanical and electrical effects of matrix materials on the potential generation and energy conversion are discussed, in the aim of guiding further improvement of nanogenerator performance.

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