Abstract
We evaluated the thermal expansion coefficients in germanium tin (Ge1 - x Sn x ) nanowire and blanket (un-patterned) film formed on Ge (001) substrate by X-ray diffraction measurement with synchrotron radiation. It was found that the thermal expansion coefficients of Ge0.968Sn0.032 are different in directions between parallel and normal to Ge substrate surface. Effect on anisotropy of lattice parameters on the anisotropic thermal expansion coefficient of Ge0.968Sn0.032 is also clarified, and the largest anisotropy was observed in blanket film.
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