Abstract
This paper presents an interferometric measurement of the out-of-plane deflections produced by a piezoelectric transducer, manufactured by thick-film deposition of a ceramic paste over an alumina substrate, when is subjected to a DC electric voltage. It is shown that a digital speckle pattern interferometer with an incorporated phase-shifting facility allows the measurement of nanometer displacements generated by the piezoelectric device. These measurements are used to evaluate the effective piezoelectric charge constant along the polarization direction ( d 33) eff that characterizes the thick-film transducer.
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