Abstract
This study investigated the permeability of parylene AF4 films of varying thickness to determine the minimum closed thickness for nanoscale packaging coatings. In particular, films with thicknesses of 15, 20, and 25 nm were deposited using 1 g of dimer and by adjusting the coating machine’s chamber height. Closeness analysis and electrochemical impedance spectroscopy (EIS) were employed to determine the minimum closed thickness. The closeness analysis results revealed a resistance of 1.35 MΩ (below the 20 MΩ threshold) for the 15 nm film, indicating a nonclosed film; conversely, the 20 and 25 nm films exhibited resistance values of 66.1 and 111.7 MΩ (above the threshold), respectively, indicating closed films. The EIS results indicated that the failure soaking times of the 15, 20, and 25 nm films were approximately <10, 20, and 50 min, respectively. These results indicate that the 20 nm film exhibited the lowest minimum closed thickness and was effective for waterproofing. These findings contribute valuable data toward developing nanoscale waterproof coatings for packaging applications.
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