Abstract

Ge/SiGe-superlattices is a novel material that was designed and fabricated as a potential material for building thermoelectric generators. One possible advantage of using such material is its ability to integrate with the Si platform. The silicon platform is known to dominate the semiconductor industry due to its low cost and the mature technology. A major limitation of using superlattice structures to build Thermoelectric generators is that it requires a buffer layer to help minimize the strain due to lattice mismatch between the alternate combinations of elements that make up the superlattice structure. It therefore becomes difficult to grow the superlattice structure above a few micrometers. Therefore, this study evaluates the optimum geometrical height of Ge/SiGe-Superlattices that will yield improved performances in the TEG, using a combination of Finite Element modelling and experimental analyses.

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