Evaluation of the deformation value of an optical flat under gravity

Abstract

The flatness of an optical surface can be evaluated using a Fizeau interferometer. There is strong demand for ensuring that the measurement uncertainty of flatness is of nanometer order over a measurement range of 300 mm or more; however, the measurement range and measurement uncertainty of flatness at the National Metrology Institute of Japan (NMIJ) are 300 mm and 10 nm, respectively. In a Fizeau flatness interferometer, the gap distance between the reference flat and the specimen is measured. To obtain the absolute profile of the specimen, the absolute profile of the reference flat should be measured in advance. The three-flat test is one of the methods used to measure the absolute profile of a reference flat. The reference flat, however, deforms under the force of gravity, and its absolute deformation value cannot be determined by the three-flat test. The deformation value of the reference flat can be corrected by the finite element method (FEM) analysis; however, it is difficult to ensure the validity of the analysis and there is a large uncertainty component of the Fizeau flatness interferometer. To verify the FEM analysis, we developed a scanning deflectometric profiler (SDP) that does not require a reference flat and can directly measure a profile. We calibrated an optical flat using a Fizeau flatness interferometer and the SDP. Finally, the deformation value of the reference flat under the force of gravity was evaluated by comparing the measurement results.