Evaluation of structure and mechanical properties of Ni-rich NiTi/Kapton composite film

Abstract

NiTi thin films are usually sputtered on silicon wafers by magnetron sputtering. But the systems composed of thin film on flexible polymeric substrate are used in many applications such as micro electro-mechanical systems (MEMS). Investigation on mechanical properties of thin films has attracted much attention due to their widespread applications. In this paper, the mechanical properties of 1µm-thick crystallized Ni-49.2at%Ti thin film alloy deposited by DC magnetron sputtering on Kapton substrate are investigated by using tensile test. The as-deposited thin films are in amorphous state, then for crystallization, the thin film was annealed at 450°C for 30min. Formation of the austenite phase after annealing was confirmed by X-ray diffractometry (XRD) and differential scanning calorimetry (DSC). The surface morphology of as deposited and crystallized thin films were examined by scanning electron microscopy (SEM). Stress-strain curves of the NiTi alloy thin film were obtained by subtracting of the stress-strain Kapton curves from the corresponding curves of the NiTi/Kapton composite. The XRD results revealed that the NiTi thin film deposited on the Kapton is austenitic and presents super-elastic effect at room temperature. This pseudo elastic effect leads to more recoverable strain in NiTi/Kapton composite film compared with Kapton foils on loading/unloading test. Furthermore, it was concluded that nanostructure of the NiTi thin film is responsible for remarkable improvement of ultimate tensile strength (1.4GPa) at a strain of 30% compared with the bulk material.