Evaluation of Scanning Parameters Based on Image Entropy for Dimensional Computed Tomography Metrology

Abstract

Many types of artifacts appear in X-ray computed tomography (CT) volume data, which influence measurement quality of industrial cone beam X-ray CT. Most of those artifacts are associated to CT scanning parameters; therefore, a good scanning parameter setting can weaken the influence to improve measurement accuracy. This paper presents a simulation method for evaluating CT scanning parameters for dimensional metrology. The method can aid CT metrology to achieve high measurement accuracy. In the method, image entropy is used as a criterion to evaluate the quality of CT volume data. For entropy calculation of CT volume data, a detailed description about bin width and entropy zone is given. The relationship between entropy values of CT volume data and error parameters of CT metrology is shown and discussed. By use of this method, mainly we focus on specimen orientation evaluation, and some other typical scanning parameters are used to evaluate the proposed method. Two typical specimens are used to evaluate the performance of the proposed method.