Abstract
A Fourier transform method of holographic fringe pattern analysis is applied to measure surface residual deformations generated by a pulsed ion implanter. The technique uses a fixture that makes it possible to remove the specimen and put it back into the same position after being implanted. The phase information from interferograms extracted by means of the Fourier transform method is unwrapped using an algorithm based on cellular automata. Results computed from the application of a numerical model are compared with those determined experimentally and a reasonable agreement is obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
