Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS Actuators

Mario Kiuchi,Yoshitada Isono,Shinji Matsui,Kenichiro Nakamatsu

doi:10.1109/sensor.2007.4300443

Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS Actuators

Mario Kiuchi, Yoshitada Isono + Show 2 more

https://doi.org/10.1109/sensor.2007.4300443

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Publication Date: Jan 1, 2007

Citations: 3

Affiliation: Ritsumeikan University, Japan Science and Technology Agency, University of Hyogo

#Electron Microscope-energy Dispersive X-ray Spectrometer #Scanning Electron Microscope-energy Dispersive X-ray + Show 8 more

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Abstract

This research develops Electrostatic Actuated NAno Tensile testing devices (EANATs) to evaluate mechanical and electrical properties of carbon nanowires fabricated by focus ion beam assisted chemical vapor deposition (FIB-CVD). This research measured I-V characteristics of carbon nanowires, with diameters ranging from 88 nm to 129 nm, under tensile loading in order to evaluate the gauge factor of nanowires. The averaged gauge factor of 0.7 is lower than that of hydrogenated amorphous C films. Discussion of the mechanical and electrical properties of the nanowires is made from scanning electron microscope-energy dispersive X-ray spectrometer (SEM-EDX) and scanning transmission electron microscope (STEM) observations.

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