Abstract
This paper presents a fabrication and evaluation of an ultrasonic motor which can drive in an ultralow temperature environment. A piezoelectric performance of ferroelectric materials was evaluated at ultralow temperature. To measure the piezoelectric constant d <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">31</sub> of PMN-PT and PZT at ultralow temperature, the resonance-antiresonance method was applied. The d <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">31</sub> of the PMN-PT was higher than that of PZT at 4.5 K. Additionally, we have fabricated and evaluated an ultrasonic motor that have a bolt-clamped Langevin-type transducer. The performance of the transducer and the efficiency of the motor had similar decreasing tendency with driving temperature.
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