Abstract
The magnitude and the spectral form of bremsstrahlung signal contains much information about the target and is significantly influenced by the surface irregularities. By computer modelling, it is possible to extract the information to perform more accurate quantitative x-ray microanalysis for specimens with special geometries. In this research, bremsstrahlung spectra obtained from electron beams striking at selected locations of spherical particles were investigated by Monte Carlo simulations and experimental observations. The effects of surface geometries and the x-ray path lengths in the specimens on the variation of bremsstrahlung spectra and peak-to-background ratios were studied.The Monte Carlo electron trajectory calculations were determined with a screened Rutherford cross-section and a plural scattering model. The continuum x-ray depth profile is computed using Kramer's bremmstrahlung cross-section. The cross-section for inner shell ionization proposed by Green and Cosslett were employed for calculating characteristic x-rays. Bethe stopping power was determined by using the Luo-Joy modification at low energies. The mass absorption coefficient was calculated using Heinrich expression. The detector efficiency was determined experimentally.
Published Version
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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