Evaluation of Nanomechanical Properties of Surfaces

Abstract

The current topic related to the evaluation of the nanomechanical properties of nanometer scale surfaces is reviewed and refer to our recent results on the evaluation of the nanomechanical properties of nanoperiod multilayer solid lubricant (WS2/MoS2)n films deposited by radio frequency (RF) supttering, nanoperiod multilayer (CN/BN)n films deposited by RF sputtering, diamondlike carbon (DLC) films deposited by a bend type filtered cathodic vacuum arc (FCVA) technique and a lubricant on perpendicular-recording magnetic disks. In the field of micro-nano technology, nanoscale evaluation technology is necessary and important for determining surface properties, particularly mechanical properties. The evaluation of thin-film surfaces has been performed by nanoindentation tests and nanoscratch tests using an atomic force microscope. On the other hand, as nanowear tests have enabled the evaluation of the average mechanical properties of a thin-film surface, it has become possible to evaluate a difference of about 0.1 nm by choosing appropriate loads. The properties of vibrational nanoprocessing, surface friction, viscoelastic properties and other dynamic properties can be evaluated by applying a force modulation method using scanning probe microscope (SPM). Moreover, when characterizing a surface it is effective to evaluate mechanical properties and other physical properties simultaneously. Surface damage and lubricant conditions have been studied by measuring the friction force and current distribution in lateral vibration tests.