Abstract
In our previous study, a comparative investigation of the sintering behavior of Pb(Zr0.52Ti0.48)O3 (PZT) ceramics prepared by aerosol deposition (AD) and conventional solid-state sintering (CV) was performed. As a result, despite the small grain size of 0.42 micro m, AD-processed PZT ceramics fired at 1000°C showed good electrical properties comparable to those of bulk PZT ceramics with a large grain size (G.T. 1 micro m) prepared by CV at 1100 to 1200°C. In this study, Vickers hardness of AD-processed PZT ceramics was evaluated as a function of firing temperature and compared with those of CV-processed specimens. As a result, higher hardness was obtained in AD due to the smaller grain size, which is indicating that piezoelectric ceramics with higher mechanical properties can be prepared by AD without any sacrifice in electrical properties.
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