Abstract
Lanthanum gallium silicate (langasite, La 3Ga 5SiO 14) is a piezoelectric material with promising properties for micro-electromechanical applications at high temperatures. So far it has been used for SAW and BAW devices. This paper reports on the possibility of fabricating microstructures in langasite by wet chemical etching. The etching behavior of different chemicals applying different mask materials is investigated. As a first demonstrator a cantilever beam in langasite is produced showing the possibility of MEMS in langasite. The mechanical velocity spectrum and the electrical spectrum are recorded. Elevated temperatures are applied to the beam and another spectrum is recorded proving the functionality up to 700 °C.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
