Abstract
The compatibility of InGaAs and InP with a series of proprietary and non-proprietary stripping formulations was investigated. Acidic and aqueous alkaline chemistries were found to be compatible, but semi-aqueous alkaline formulations displayed a variety of compatibilities, from the most compatible to least compatible chemistries tested. For semi-aqueous alkaline solutions, solvent selection and water content have a large impact on InGaAs and InP compatibility, but alkali selection was determined to be the most critical component for InGaAs and InP compatibility.
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