Evaluation of inelastic energy losses for low-energy Ne + ions scattered from aluminum and silicon surfaces

Abstract

The purpose of our work is a thorough experimental study of low-energy Ne +-ion scattering from aluminum and silicon by using an advanced mass-energy spectrometer operated with the true scattering angle, i.e., without any electric fields between the target and the analyzer; this paper reports an assessment of inelastic energy losses. Accurate evaluation of the average inelasticity for low-energy Ne + confirmed literature data ( Q=45±5 eV), but only for Ne +-to-Al. It was found that the mean value of inelasticity for Ne +-to-Si was about 55±5 eV. Different inelastic losses for the neon primary-ion isotopes ( 20Ne + and 22Ne +) scattered from aluminum and silicon targets, as well as for the doubly charged ions Ne 2+, were evaluated. New data concerning the dependence of inelasticity on the primary energy were obtained.