Abstract
Most current MEMS are using LIGA nickel films as their structural material. In order to design and produce MEMS devices accurately, it is very important to know the mechanical properties of LIGA films. However, the mechanical property evaluation for LIGA films is difficult, because LIGA films have anisotropic mechanical properties due to their microstructures and the specimens to be used in the mechanical property evaluation testing are too small to handle easily. Consequently, the evaluation methods for LIGA films have not been standardized. In this study, the Young's modulus and yield stress of LIGA nickel films are evaluated by a series of spherical indentation testing and elastoplastic analysis. Then, the effect of non-equilibrium microstructures of LIGA films on anisotropic mechanical properties is discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
