Abstract
Thermal oxidation using the SrTixMg1−xO3−δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal–Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24 mm.
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