Evaluation of dislocation densities in HgCdTe films by high-resolution x-ray diffraction

Abstract

The dislocation densities in HgCdTe films grown on CdZnTe by Liquid Phase Epitaxy (LPE) are calculated based on their effects on the x-ray rocking curves. The dislocation densities derived from three kinds of methods, i.e. FWHM of X-ray double axis diffraction, Williamson-Hall plot and Pseudo-Voigt function, are approximately the same. It is found that the thickness of HgCdTe epilayers about 10 um is large enough so that effect of crystallize size on the rocking curves width can be ignored. Because the intrinsic FWHM of HgCdTe and the instrumental function of high resolution X-ray diffraction are neglected in Williamson-Hall plot and Pseudo-Voigt function, the dislocation densities obtained by these methods are a little larger than those derived from the first kind of method. Among three kinds of methods, Pseudo-Voigt function method is the easiest one to fit the rocking curves and calculate the dislocation densities.