Evaluation of Dielectric Properties of Ferroelectric Fine Particles Fabricated by Focused Ion Beam Technique

Abstract

In this study, we propose a method for evaluating the dielectric property of a single fine particle using the focused ion beam technieque. Lead zirconate titanate (PZT) particles (Sakai Chemical Industry LQ) were sintered at 1473 K for 2 h to fabricate bulk PZT. The bulk PZT was milled to fabricate sample particles. The particles were dispersed on a Au surface substrate, and were shaped into a parallel-plate capacitor using the focused ion beam (FIB) technique. The FIB technique was used to deposite tungsten, W, with a square shape on top of the particle sample as an upper electrode, and the particles were shaved into a rectangular shape; the area of the electrode was 2×10-12 m2 and the thickness of the PZT segment was 2×10-6 m. The capacitance of the fabricated PZT particle sample was successfully measured by compensating the parasitic capacitance of the experimental setup. Consequently, the relative permittivity of the PZT particle sample was 1250 at 105 Hz. This value was comparably close to the 1750 of the bulk PZT. The issue of electric contact between the particles and the substrate should be overcome in order to discuss permittivity quantitatively.