Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image

Abstract

The depth of field (DoF) in scanning electron microscope (SEM) images has been determined by estimating the change of image sharpness or resolution near the exact focus position. The image sharpness or resolution along the optical axis is determined by calculating the information-passing capacity (IPC) of an optical system taking into account the effect of pixel size of the image. The change of image sharpness near the exact focus position is determined by measuring the slope gradient of the line profile in SEM images obtained at various focal positions of beam. The change of image sharpness along the optical axis determined by the IPC agrees well with those determined by the slope gradient of line profiles in SEM images when a Gaussian distribution having radius 0.86 L p ( L p: pixel size in image) at which the intensity has fallen to 1/e of the maximum is applied to the IPC calculation for each pixel intensity. The change of image sharpness near the exact focus position has also been compared with those determined by the CG (Contrast-to-Gradient) method. The CG method slightly underestimates the change of image sharpness compared with those determined by the IPC method.