Abstract

has a low luminescence efficiency and its surface readily deteriorates by electron or photon excitation at the power levels generally required to perform spatially resolved cathodoluminescence (CL) or photoluminescence scanning. Previous CL studies employed a sophisticated mirror system to provide the necessary collection efficiency to image defects in . In this paper, we demonstrate a simple high collection efficiency CL technique using a solid‐state photodiode within the sample chamber of a scanning electron microscope. A comparison is made of the patterns formed by the CL dark spots and the etch features produced by a known defect etchant.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.