Evaluation of Defect and Performance in Thermoelectric Modules by Infrared Thermography

Abstract

Recently, thermoelectric modules have been actively used in semiconductor production lines and household electrical appliances. In particular, the existing compressor-type chillers used in semiconductor processes are being replaced by electronic chillers that use thermoelectric modules. In home appliances, the demand is increasing for water purifiers, and they have been utilized in various industries as well as in other products. As thermoelectric modules are manufactured based on the modularization by welding, several tens to hundreds of n-type and p-type thermoelectric semiconductor chips with units of millimeters or micro meters are used. During processing, the internal structural integrity and defect inspection are required when making samples. The soundness of samples is difficult to inspect. Therefore, basic studies for defect and performance evaluation are conducted in the present study. We found that the defects of thermoelectric modules could be detected within a short time and also the quantitative temperature distribution could be monitored for securing performance evaluation.