Abstract
AbstractThe dependence of deep levels in GaN epitaxial layer grown by molecular beam epitaxy on the V/III ratio was studied by capacitance deep level transient spectroscopy (DLTS). Four peaks corresponding to the electron traps were observed in the unintentionally n‐doped GaN films grown at various growth conditions. The deep level concentrations of T1 (0.31 eV) and T4 (0.21 eV) traps increased with decrease of the V/III ratio. This suggests that T1 and T4 traps are related to the N‐vacancies. Those of T2 (0.84 eV) and T3 (1.13 eV) traps did not show obvious dependence on the V/III ratio, but the concentration of the T2 and T3 traps increased with increase of the residual carrier concentration. T2 and T3 traps might have some correlation with the residual donor species. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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