Evaluation of a surface acoustic wave motor with a multi-contact-point slider

Abstract

Previously, the surface acoustic wave linear motor has been demonstrated and its exact pre-load conditions investigated. Based on this previous research, multi-contact-point sliders were designed and tested. A maximum output force of 0.45 N, 450 times that obtained in preliminary experiments, was successfully obtained. Simple simulation results predicted that much larger thrust would be available by increasing the actual contact point area without changing the slider and the stator dimensions. The calculated output force was 10 N, roughly twenty times that observed experimentally. To realize the required stator texture of the contact surface, a silicon micro-machining technique or other conventional methods would be applicable.