Abstract
AbstractIn this paper we present results of the evaluation of a thermal gas flow sensor device implemented on a printed circuit board (PCB) substrate by a combination of PCB and MEMs technologies. The device consists of 3 parallel Pt strip resistors in direct electrical contact to patterned copper tracks of the PCB. For planarization purposes, the Pt strips reside on a thick polymer layer (SU8). The central resistor plays the role of a heater and the two other resistors, situated symmetrically on both sides of the heater, are temperature dependent sensing elements. The three main advantages of this specific sensor are: the low thermal conductivity of the substrate materials (FR4 and SU8, with thermal conductivity ∼0.2 W(m·K)) which permits high sensitivity at low power, its robustness compared to suspended membrane sensors and its simple fabrication process. The sensor can operate in both hot wire and calorimetric modes. The sensor was mounted inside a 1.5m long tube with 25 mm2 cross sectional area and was evaluated in nitrogen flow up to 100 SLPM, which corresponds to Reynolds numbers up to 25.000. The sensor signal in both the calorimetric and the hot‐wire modes is a monotonous function of the flow rate. A very high sensitivity is obtained in the calorimetric mode at very low flow rates (<0.05SLPM), while the sensor signal in the hot‐wire mode appears to be a linear function of the flow rate throughout the entire measurement region. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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