Abstract
This paper has developed an evaluation method of the plasma-resistant characteristics of coated parts for plasma processing equipment. To quantitatively analyze the performance of coated parts, a plasma-resistant test was conducted on Al 2O 3 films, which have been widely used as a parts coating material. The breakdown voltage, surface roughness, etching rate, and particle generation were measured. The results indicated that the breakdown voltage dramatically decreased after plasma exposure, and electrical properties declined. Surface roughness, etching rate, and particle generation linearly increased depending on plasma exposure time. Under comprehensive consideration of the changes in characteristics caused by the impact of plasma processes, an evaluation method has been developed for the characteristics of coated parts for plasma processing equipment.
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