Abstract
This paper presents a calibration method, recently realized at INRIM, suitable for the calibration of 3-axis accelerometers in frequency domain. The procedure, allows to simultaneously evaluate the main and transverse sensitivities on three axes by means of a single-axis vibration excitation of inclined planes. Nevertheless, the excitation system is subjected to spurious motions mainly due to the vibrational modes of the inclined planes and to the horizontal motions of the shaker. In order to provide the proper sensitivities to the 3-axis sensors, the evaluation of systematic effects is experimentally carried out and the related correction is proposed.
Highlights
The 3-axis accelerometers, especially low-cost unconventional-shaped transducers, such as MEMS sensors, are largely used in a wide range of advanced industrial, environmental, energy and medical applications, and in particular within extensive sensor and multi-sensor networks [e.g., 1 – 10]
The calibration system, developed at INRiM, allows to simultaneous evaluate the main and the transverse sensitivity, in frequency domain, of 3-axis accelerometers, by means of a single-axis vibration excitation, by using inclined planes rigidly fixed to the vibrating table [14, 15]
The mechanical calibration system, composed of the shaker and the inclined planes, is characterized in order to take into account systematic effects
Summary
The 3-axis accelerometers, especially low-cost unconventional-shaped transducers, such as MEMS sensors, are largely used in a wide range of advanced industrial, environmental, energy and medical applications, and in particular within extensive sensor and multi-sensor networks [e.g., 1 – 10]. In the particular case of digital MEMS accelerometers, the sensitivity is generally provided by manufacturer without traceable calibration methods and is obtained in static conditions, whereas dynamic response, as a function of frequency, is often barely known or completely disregarded. Given this condition, a simultaneous 3-axis vibration calibration system with a single axis excitation to be exploitable by manufacturers is proposed. This paper deals with the evaluation of systematic effects of this system
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