Abstract
Tailored intensity distribution enables efficient microstructuring as the maximum pulse energy of an ultrashort-pulsed laser can be applied. Dynamic adaptation of the intensity profile can be realized by holographic laser beam shaping using phase-only liquid crystal on silicon (LCoS) displays as a spatial light modulator (SLM). To achieve the desired intensity profile at the focal plane an accurate phase retardation of the SLM's liquid crystals has to be guaranteed. In this publication we present the phase calibration of three LCoS SLM from different manufacturers. Each system is evaluated for direct laser structuring applications. As one of the tested SLM show a spatially nonlinear behavior, a compensation method proposed by Engström et al. in 2013 is applied. Finally, the necessity of this phase calibration is presented and discussed by applying a squared flat-top profile.
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