Evactron™ Cleaning of SEM Specimens using an In-Situ RF Plasma on the SEM Chamber

Abstract

The EVACTRON is a new device (US Patent 6,105,589) designed to remove hydrocarbons from SEM specimens and SEM chambers to prevent contamination artifacts. The device uses a lowpowered RF plasma to make oxygen radicals from air. These radicals oxidize hydrocarbons to make CO, H2O, and CO2 that can be removed by the vacuum pump. The use of air as an oxygen source is convenient to the SEM operator but limits the cleaning effectiveness of the system to easily oxidized carbon species. The system does remove high percentages of the usual contamination problems of vacuum pump oil and skin oil hydrocarbons from surfaces in a relatively short time.The EVACTRON SEM-CLEAN™ system provides a safe method for plasma cleaning inside the SEM. Air as a diluted oxygen gas mixture is chosen as the plasma reactant gas. Air is passed through a low-power RF glow-discharge to create oxygen radicals inside a generator mounted on a specimen chamber port. The generator chamber is subject to the same vacuum as the specimen chamber, and the vacuum pressure and gas flow are controlled by the EVACTRON SEM-CLEAN controller. The radicals are carried out of the plasma into the whole of the specimen chamber by convection. in the chamber they react with all exposed surfaces including the specimen if present. The plasma itself is confined to the generator chamber, which prevents ion and electron bombardment damage to the instrument or specimen.