Abstract
We present preliminary performance results for a new type of imaging microscope operating in the EUV and soft x-ray regions. This microscope is a true transmission microscope in which an unmagnified image of the sample is formed by differential absorption of the x-ray beam as it passes through the sample. The unmagnified photon image is converted into low energy secondary electrons at a thin CsI photocathode, and the subsequent electron pattern is magnified and imaged using a simple 3-lens system. Conversion of the magnified electron patern into visible photons occurs at a fine grain phosphor viewed by a CCD detector/computer combination that allows parallel detection of the original photon image in near real time with approximately 1000× magnification. The microscope has a theoretical resolution of 20 nm and a potentially wide range of uses including biology, materials science studies, and investigations into magnetic dichroism effects. The design and preliminary imaging results of the microscope will be presented and future directions discussed.
Published Version
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