Abstract
The microstructure and ethanol sensing properties of TeO2 thin films prepared by non-hydrolytic sol–gel process were investigated. Microstructural characterizations showed that TeO2 thin films were identified as tetragonal in the TeO2 structure. The films with porous cotton-shaped nanostructures were assembled by numerous TeO2 nanostrips with a diameter of 80–350nm and a length of 250–900nm. Non-hydrolytic process of TeO2 thin films was discussed. Gas sensing measurements demonstrated that the sensors based on TeO2 thin films obtained the highest response to ethanol gas at an operating temperature of 200°C. The sensors showed reversible and quick response to ethanol gas at various operating temperatures and ethanol concentrations. The high porosity and continuous crystalline network of TeO2 thin films are responsible for their excellent performance in ethanol gas sensing.
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