Abstract
Pure TiO2 thin film was fabricated on glass substrate using the sol–gel spin coating technique. The TiO2 based gas sensing element was used to study the sensing behavior of ethanol at room temperature. The film was characterized by using XRD, FESEM, and Two-point probe method. The XRD diffraction pattern confirmed the formation of the anatase phase and has porous morphology. It was found that TiO2 thin film had the good sensor response to ethanol gas. The ethanol response for 100 ppm was 2.05, which increased significantly to 5.84 for 500 ppm of ethanol. The response and recovery time of thin film element for 500 ppm of ethanol was 120 and 156 s, respectively. The stability of this thin film sensor element was tested over a period of one year. It was found that there was no deterioration in sensor characteristics of thin film element.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
