Abstract
The etching characteristics of phosphate glass VG-13 have been studied in various etching conditions using relativistic heavy ions 238U, 197Au and 139La. The addition of KF to HBF4 solution obviously increases the sensitivity of VG-13. The effects of concentration of KF on S and Vg were studied. For La ions (z/β=63), S was measured to be about 1.15.
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